Alicat offers in-line sintered filters for use with our mass flow meters and mass flow controllers to prevent large particulates from entering the measurement head of the instrument. Maximum particulate sizes are as follows:
#10-32 UNF In-Line FiltersPart Numbers: 510053, 510054 Our #10-32 UNF in-line filters are designed to work with our micro-flow mass flow meters and controllers with full-scale ranges of 0-50 sccm or less (0-20 sccm or less for Whisper units). They screw directly into the mass flow meter or controller’s #10-32 UNF-threaded inlet process connection. The filter elements are not removable and are available in the following sizes:
*Note: If you are using our #10-32 UNF to 1/8" NPT adapter with your micro-flow mass flow instrument, use a #10-32 UNF in-line filter between the flow body and the adapter instead of a 1/8" NPT in-line filter before the adapter. |
#10-32 UNF in-line filters |
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ILF Series In-Line FiltersPart Numbers: ILF-1/8-20, ILF-1/4-40, ILF-1/2-40, ILF-3/4-40 Our ILF Series of in-line filters for mass flow meters and controllers feature user-accessible filter elements that may be purchased separately for replacement. They are available in NPT sizes from 1/8" to 3/4" to accommodate our mass flow instruments with full-scale ranges of 0-100 sccm or greater (0-50 sccm or greater for Whisper units). They screw directly into the mass flow meter or controller’s NPT-threaded inlet process connection. The filters are available in the following sizes:
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ILF Series In-Line Filter ElementsPart Numbers: ILFE20, ILFE40, ILFE40L Our ILF Series of in-line filter elements replace the sintered filter elements that come with the ILF Series filters. Each filter element replacement includes fresh O-rings as well as the filter element itself. Filter elements are available in the following sizes:
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