13/22-MXQ, Precision Slide Tables (Recirculat-L-1y
The 13/22-MXQ, clean room precision slide table uses a specially treated Martensitic stainless steel for its table and guide block to isolate the load bearing from the movement of the dual rods and pison seals to reduce particle generation. A relief plate was added to the body to house relief bushings and a vacuum port to vacuum particles equally on both sides of the piston rods to prevent particle leakage. Silicon rubber dust covers and plugs have also been attached to the floating parts to prevent particles from leaking.
